Tehran University of Medical Sciences Frontiers in Biomedical Technologies 2345-5837 6 3 2019 09 30 123 138 Hossein Amiri Department of Medical Physics and Biomedical Engineering, School of Medicine, Tehran University of Medical Sciences, Tehran, Iran Reza Nadafi Department of Mechanical Engineering, Amirkabir University of Technology, Tehran, Iran 2019 07 13 2019 08 04 Purpose: Several studies were carried out in the field of neural microelectrode that caused the different generation of neural electrode appeared. Neural microelectrode has an important effect on the BCI interference and also is used in medical applications such as the detection and treatment process of different diseased. Therefore, achieving the structure of the electrode that has the high ability at recording and stimulating is so essential. This article aims at studying the different structure of Microelectrode, according to MEMS technology, and comparing their properties. Materials and Methods: In this research, we introduce 7 designs for microelectrode fabrication that 3 designs are according to research that has been carried out so far and 4 designs have been proposed by authors and their fabricated process described. The microelectrode performance was determined by cost, biocompatibility, mechanical and electrical properties. Results: The mechanical analysis was carried out using software and displacement, stress, and critical load factor calculated. Conclusion: At last, the performance of the designed electrode was compared according to those parameters and the application of each design on the practical experiment described. https://fbt.tums.ac.ir/index.php/fbt/article/view/215 https://fbt.tums.ac.ir/index.php/fbt/article/download/215/133